Silicon carbide, a new opportunity for the development of the power semiconductor industry
2020-09-30
成分
|
|
高纯氦气
|
单位
|
氦气
|
≥
|
99.999%
|
%V
|
氖气
|
≤
|
4
|
ppmv
|
氢气
|
≤
|
1
|
ppmv
|
氧气
|
≤
|
1
|
ppmv
|
氮气
|
≤
|
2
|
ppmv
|
一氧化碳
|
≤
|
0.5
|
ppmv
|
二氧化碳
|
≤
|
0.5
|
ppmv
|
甲烷
|
≤
|
0.5
|
ppmv
|
水份
|
≤
|
3
|
ppmv
|
型号
|
WMA219-40-15
|
容积
|
8、40(m3)
|
高度
|
1.310(m)
|
外形尺寸
|
0.219*1.310(m)
|
重量
|
48(kg)
|
材质
|
37Mn
|
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